Business Imec reduces processing cost of solar cells while increasing efficiency.
2013/11/29Imec has used a laser doping process to reduce the cost of producing i-PERC solar cells while increasing their efficiency to 20.2%.
“Cost-of-ownership and process simplicity are key factor for the industry to adopt new technologies,” says Imec’s Jozef Szlufcik, “our achievement, implying a substantial simplification of the i-PERC manufacturing process, is an important step towards reducing the cost-of-ownership of i-PERC technology and as such, a milestone in bringing this high-efficiency technology for silicon solar cells to the market.”
Imec used large area (156x156mm2) i-PERC silicon cells on p-type Cz-Si.
The a laser doping processing sequence eliminates the need of a furnace firing step to realise the local aluminium Back Surface Field (BSF). Replacement of the high-temperature ste, avoids passivation degradation of the rear (Al2O3) layer created by atomic layer deposition (ALD).
The replacement laser doping step is also said to avoid optical degradation of the rear dielectric/metal stack that generates higher conversion efficiencies. The new process sequence is said to be extremely simple as the thin ALD (Al2O3) acts at the same time as passivation layer and doping source, while laser processing enables in one step the contact patterning and the local BSF formation.
In addition, the high Fill Factor of the cells (up to 80%) indicates an excellent contact quality, according to imec.
Combined with imec’s Ni/Cu plating sequence for front contact formation, a low temperature metallisation solution for i-PERC cells has been developed.
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